The LM-2D MARK system mainly includes two system modules, Wafer Mapping and Strip Mapping, which can automatically control defective products, reduce costs and
improve efficiency by unified management of physical barcodes and MAP of wafers and substrates. The system supports the functions of graph data format conversion,
graph merging and checking, graph upload/download, control map control, graph overlay analysis, graph manual editing, and single product traceability between Strip and
Wafer.
◆ Whole process graph management
◆ Strip Mapping management
◆ Unit dimension traceability management
◆ Atlas file analysis
◆ Automatic merging and verification of the atlas
◆ Graph big data analysis
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