The LM-RMS system realizes automatic upload, download, comparison and other control of programs, prevents manual modification or misoperation, and provides the function
of integrated management of device-dimensional Recipe and Recipe Body, reducing the error rate of manual operation and improving product yield.
◆ Improve equipment production efficiency and manual operation efficiency, and control user authority
◆ Golden Recipe standard production
◆ Upload device programs on the interface
◆ Interface to download the program to the device
◆ Program version history letter
◆ Automatic comparison of equipment programs
◆ Comparison of previous versions of the program
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